Position detecting system and exposure apparatus having the same

Details Position detecting system and exposure apparatus having the same Position detecting system and exposure apparatus having the same

1995-10-25

1998-04-28

Hantis, K.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

2505593, G01B 100

Patent

active

057452423

ABSTRACT:
A position detecting system, for detecting a position of an object, includes a light detecting device having arrayed light detecting elements, a moving mechanism for producing relative movement between the object and the light detecting device, and a control device for causing the moving mechanism to produce relative movement between the object and the light detecting dvice of a predetermined unit amount and in a predetermined position detecting direction, and also to cause the light detecting device to detect, at respective positions, light from a mark formed on the object, wherein the control device calculates mark positions from signals obtained at the respective positions, and also determines the position of the object on the basis of the calculated mark positions.

REFERENCES:
patent: 4550374 (1985-10-01), Meshman et al.
patent: 5124562 (1992-06-01), Kawashima et al.
patent: 5235408 (1993-08-01), Matsugu et al.

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