Position detecting system

Details Position detecting system Position detecting system

1981-12-22

1986-05-20

Rosenberger, R. A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356 1, 356376, G01B 1100, G01B 1500

Patent

active

045897735

ABSTRACT:
A position detecting system suitable for the position control of the surface of a workpiece mounted in an electron beam exposure system is disclosed which includes an electrically-driven light source, a first optical system for focusing a light beam from the light source on a workpiece, a position-controlling table for mounting thereon the workpiece, a second optical system for focusing light reflected from the workpiece on a predetermined image surface, a photodetector having a light receiving surface arranged on the image surface, and a negative feedback amplifier for controlling the light source by the output of the photodetector.

REFERENCES:
patent: 3909131 (1975-09-01), Waters
patent: 4299491 (1981-11-01), Waters et al.
patent: 4325640 (1982-04-01), Dreyfus et al.
patent: 4326804 (1982-04-01), Mossey
patent: 4332477 (1982-06-01), Sato
Kelly, Brian O., "Lateral-Effect Photodiodes", Laser Focus, Mar. 1976.

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