Position detecting system

Details Position detecting system Position detecting system

1996-09-03

1998-03-10

Hantis, K.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

2505593, 356375, G01B 1100

Patent

active

057267588

ABSTRACT:
A position detecting system and method for detecting the relative positional relationship between first and second objects disposed opposed to each other includes providing first and second marks on first and second objects, respectively, and irradiating one of the first and second marks with light from an irradiating light source. In addition, the other of the first and second marks is placed out of an irradiation region of the irradiating source and first diffraction light diffracted by one of the first and second marks is detected. Next, a first signal corresponding to the light intensity distribution of the first diffraction light is stored in memory. Both the first and second marks are then irradiated with light from the irradiation source and second diffraction light diffracted by both the first and second marks is detected. Next, a second detection signal corresponding to the light intensity distribution of the second diffraction light is stored in memory. Finally, the relative positional relationship between the first and second objects is determined on the basis of a third signal provided by excluding the stored first signal from the stored second signal.

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patent: 5481363 (1996-01-01), Matsugu et al.

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