Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1996-09-03
1998-03-10
Hantis, K.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
2505593, 356375, G01B 1100
Patent
active
057267588
ABSTRACT:
A position detecting system and method for detecting the relative positional relationship between first and second objects disposed opposed to each other includes providing first and second marks on first and second objects, respectively, and irradiating one of the first and second marks with light from an irradiating light source. In addition, the other of the first and second marks is placed out of an irradiation region of the irradiating source and first diffraction light diffracted by one of the first and second marks is detected. Next, a first signal corresponding to the light intensity distribution of the first diffraction light is stored in memory. Both the first and second marks are then irradiated with light from the irradiation source and second diffraction light diffracted by both the first and second marks is detected. Next, a second detection signal corresponding to the light intensity distribution of the second diffraction light is stored in memory. Finally, the relative positional relationship between the first and second objects is determined on the basis of a third signal provided by excluding the stored first signal from the stored second signal.
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Hasegawa Masanobu
Osawa Hiroshi
Canon Kabushiki Kaisha
Hantis K.
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