Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1993-02-22
1994-06-07
Rosenberger, Richard A.
Optics: measuring and testing
By polarized light examination
With light attenuation
356401, 250548, G01B 1114, G01N 2186
Patent
active
053194446
ABSTRACT:
A method of detecting relative positional deviation between first and second objects. The method includes the steps of providing the first object with a first mark which functions as a lens, providing the second object with a second mark which functions as a lens, providing an optical system between the first and second objects, directing a radiation beam through the first mark and the optical system to the second mark, and detecting any shift of the radiation beam from the second mark irradiated with the radiation beam from the optical system, to detect the relative positional deviation of the first and second objects.
REFERENCES:
patent: 4037969 (1977-07-01), Feldman et al.
patent: 4265542 (1981-05-01), Snow
patent: 4326805 (1982-04-01), Feldman et al.
patent: 4360273 (1982-11-01), Thaxter
patent: 4498762 (1985-02-01), Uehara et al.
patent: 4545683 (1985-10-01), Markle
patent: 4600309 (1986-07-01), Fay
patent: 4662753 (1987-05-01), Yabu
patent: 4694186 (1987-09-01), Onoda et al.
patent: 4728193 (1988-03-01), Bartelt et al.
patent: 4769523 (1988-09-01), Tanimoto et al.
patent: 4835078 (1989-05-01), Harvey et al.
patent: 5114236 (1992-05-01), Matsugu et al.
patent: 5162656 (1992-11-01), Matsugu et al.
H. Chau, "Properties of Two Overlapping Zone Plates of Different Focal Lengths," Journ. of the Opt. Soc. of America, Feb. 1970, vol. 60, No. 2 pp. 255-259.
Chau, "Moire Pattern Resulting From Superposition of Two Zone Plates," Applied Optics, Aug. 1969, vol. 8, No. 8, pp. 1707-1712.
"A Dual Grating Alignment Technique for X-Ray Lithography", J. Vac. Sci. Technol. B1 (4), Kinoshita, et al., Oct.-Dec. 1983, pp. 1276-1279.
"Opt.-Heterodyne Detect. of Mask-to-Wafer Displac. for Fine Align.", Japan. Journal of Appl. Physics, Itoh, et al., vol. 25, No. 8, Aug. 1986, L684-L686.
Matsugu Masakazu
Niwa Yukichi
Nose Noriyuki
Saitoh Kenji
Suda Shigeyuki
Canon Kabushiki Kaisha
Pham Hoa Q.
Rosenberger Richard A.
LandOfFree
Position detecting method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Position detecting method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Position detecting method and apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-797124