Position detecting device

Details Position detecting device Position detecting device

1997-06-26

1998-08-04

Hantis, K.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356375, G01B 1100

Patent

active

057902585

ABSTRACT:
A position detection device for detecting the position of an object includes a light source for generating light, an illumination device introducing the light from the light source to the object, and a detector for detecting the position of the object on the basis of a sensed optical image. The detection device further includes an image forming optical system for forming the image of the object on a detection surface of the detector at a first magnification. The device also includes an optical member insertable into and retractable from an optical path of the light travelling from the object to the detector. Insertion of the optical member into the optical path allows the light from the object which has been passed through at least part of the optical member and the image forming optical system to form the image of the object on the detection surface of the detector at a second magnification smaller than the first magnification.

REFERENCES:
patent: 4645924 (1987-02-01), Suzuki et al.
patent: 4669883 (1987-06-01), Ina et al.
patent: 4672557 (1987-06-01), Tamura et al.
patent: 4777374 (1988-10-01), Nakata et al.
patent: 4834540 (1989-05-01), Totsuka et al.
patent: 4861162 (1989-08-01), Ina
patent: 4883359 (1989-11-01), Ina et al.
patent: 4886974 (1989-12-01), Ina
patent: 4901109 (1990-02-01), Mitome et al.
patent: 5050111 (1991-09-01), Ayata et al.
patent: 5114235 (1992-05-01), Suda et al.
patent: 5133603 (1992-07-01), Suzuki et al.
patent: 5137363 (1992-08-01), Kosugi et al.
patent: 5276550 (1994-01-01), Kojima
Yamanaka et al "NA and .delta. Optimization for High NA I-Line Lithography", SPIE vol. 1927 1993, pp. 310-319.

Affiliated with

Also associated with

Rating

Position detecting device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Position detecting device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Position detecting device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1183659