Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1997-01-27
1998-02-10
Hantis, K.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
250548, G01B 1100
Patent
active
057174920
ABSTRACT:
A position detection apparatus and method detects the relative positional relationship between first and second objects facing each other in a facing direction. First, second and third marks each serving as a physical optical element are provided on the first object, while a fourth mark serving as a physical optical element is provided on the second object. A light projector projects light onto the first and second objects A light detector detects a first light beam diffracted by the first mark and reflected by the second object, a second light beam diffracted by the second mark and reflected by the second object, and a third light beam diffracted by the third and fourth marks. A first position detector detects the relative positional relationship between the first and second objects in the facing direction based on signals representing the first and second light beams from the light detector. A second position detector detects the relative positional relationship between the first and second objects in a direction perpendicular to the facing direction based on signals representing the first, second and third light beams from the light detector.
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Hasegawa Masanobu
Osawa Hiroshi
Saitoh Kenji
Sentoku Koichi
Canon Kabushiki Kaisha
Hantis K.
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