Position control system for scanning probe microscope

Details Position control system for scanning probe microscope Position control system for scanning probe microscope

1996-01-25

1998-03-17

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

73105, H01J 3700

Patent

active

057290156

ABSTRACT:
A position control system for a scanning probe microscope which performs calculations so that the natural resonant frequency of a piezoelectric element may be as flat as possible, and then controls the scanning voltage of the piezoelectric element. The scanning signal from outside a position control circuit is inputted to an integral compensator via a comparator. The output of the integral compensator is supplied from an adder to the piezoelectric element via a high-voltage amplifier and also to a reference model section. The output of the piezoelectric element, together with the output of the reference model section, is supplied to a comparator and at the same time, is fed back to the comparator via a displacement sensor. Furthermore, the comparator inputs a correcting voltage Va to an adder via an adaptive mechanism section. The scanning voltage added at the adder is amplified at the high-voltage amplifier, which supplies the amplified voltage to the piezoelectric element as a control voltage Vp.

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patent: 5521390 (1996-05-01), Sato et al.
patent: 5543614 (1996-08-01), Miyamoto et al.

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