Portable scanning electron microscope

Details Portable scanning electron microscope Portable scanning electron microscope

2005-05-24

2005-05-24

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S441110

Reexamination Certificate

active

06897443

ABSTRACT:
We have developed a particular combination of elements and devices which enables the portability of a scanning electron microscope (SEM). In particular the combination enables a small size, typically less than about 50 liters, a manageable weight, typically less than about 15 kg, and a low power requirement, typically less than about 100 W, which permits operation using power supplied from a portable source such as a battery. Higher performance versions may exhibit increased volume in the range of about 150 liters, increased weight, in the range of 45 kg, and a power requirement in the range of 300 W. The higher performance version of the portable scanning electron microscope may be portable with the assistance of a dolly (rolling cart) or with the assistance of attached wheels and pulling appendage.

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John L. Callas, “Miniature Scanning Electron Microscope for In Situ Applications”, presentation at 1999 NASA/JPL Workshop on Miniature Vacuum Pump Technology, pp. 1-9. (Applicant is submitting only pp. 1, 4-6 and 8-9, as these are the only pages applicant has been able to obtain.).

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