Portable high resolution scanning electron microscope column usi

Details Portable high resolution scanning electron microscope column usi Portable high resolution scanning electron microscope column usi

1998-01-30

2000-05-02

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

H01J 3718

Patent

active

060575530

ABSTRACT:
A detachable, portable SEM column that is easily disconnected from the electron gun assembly and specimen chamber of the system, allowing different column designs to be used in a given SEM system. As an alternate design, the electron gun and column are configured as a single detachable, portable assembly. The column of the present invention contains a condenser lens and an objective lens, both designed employing permanent magnet elements for primary field generation. Relatively small coils are used for scanning and precise adjustment of focus.

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