Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Cellular products or processes of preparing a cellular...
Reexamination Certificate
2006-09-26
2006-09-26
Zemel, Iina S. (Department: 1711)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Cellular products or processes of preparing a cellular...
C438S409000, C438S781000, C438S778000, C438S780000, C438S782000, C438S960000
Reexamination Certificate
active
07112615
ABSTRACT:
Methods and systems are disclosed for fabricating ultra-low dielectric constant porous materials. In one aspect of the invention, a method for making porous low-k films is disclosed. The method uses polymer based porogens as sacrificial templates around which a chemical vapor deposition (CVD) or plasma enhanced chemical vapor deposition (PECVD) deposited matrix is formed. Upon pyrolysis, the porogens decompose resulting in a porous ultra-low dielectric material. This method can be used, for example, to produce porous organosilicate glass (OSG) materials, ultra-low dielectric nanoporous materials, porous ceramics, porous scaffolds, and/or porous metals. Various uses and embodiments of the methods and systems of this invention are disclosed.
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Gleason Karen K.
Ross April
Wu Qingguo
Engellenner Thomas J .
Massachusetts Institute of Technology
Miller Deborah A.
Nutter & McClennen & Fish LLP
Zemel Iina S.
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