Porous dielectric material with improved pore surface properties

Fishing – trapping – and vermin destroying

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

437778, 437787, 437790, 437781, H01L 21316

Patent

active

057233683

ABSTRACT:
This invention provides an improved porous structure for semiconductor devices and a process for making the same. This process may be applied to an existing porous structure 28, which may be deposited, for example, between patterned conductors 24. The process may include baking the structure in a reducing atmosphere, preferably a forming gas, to dehydroxylate the pore surfaces. The process may include baking the structure in a halogen-containing atmosphere to bond halogens to the pore surfaces. It has been found that a porous structure treated in such a manner generally exhibits improved dielectric properties relative to an untreated sample.

REFERENCES:
patent: 4652467 (1987-03-01), Brinker et al.
patent: 4764248 (1988-08-01), Bhattacherjee et al.
patent: 4987101 (1991-01-01), Kaanta et al.
patent: 5103288 (1992-04-01), Sakamoto et al.
patent: 5155576 (1992-10-01), Mizushima
patent: 5393712 (1995-02-01), Rostoker et al.
patent: 5405805 (1995-04-01), Homma
patent: 5470802 (1995-11-01), Gnade et al.
patent: 5488015 (1996-01-01), Havemann et al.
patent: 5489553 (1996-02-01), Chen

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Porous dielectric material with improved pore surface properties does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Porous dielectric material with improved pore surface properties, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Porous dielectric material with improved pore surface properties will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2247033

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.