Polysilicon devices and a method for fabrication thereof

Details Polysilicon devices and a method for fabrication thereof Polysilicon devices and a method for fabrication thereof

1997-06-20

1999-11-09

Crane, Sara

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257348, 257350, 257316, H01L 2701

Patent

active

059820047

ABSTRACT:
The present invention provides a novel thin film transistor device having the advantages of both conventional thin and thick film devices. The channel region of the device is elevated with respect to the source and drain regions by being made as a thin film while the source and drain regions are relatively thick. Such an arrangement provides high drive current characteristics of a thin film device, whilst mitigating the disadvantageous kink effect in the IV curve and the off-state leakage current known in conventional thin film devices. The invention also provides a fabrication method, and this method may also be employed to manufacture other novel semiconductor devices including EEPROM devices, large double layer storage capacitors and a novel conductivity modulated thin film transistor.

REFERENCES:
patent: 5124768 (1992-06-01), Mano et al.
patent: 5418391 (1995-05-01), Huang
patent: 5574294 (1996-11-01), Shepard

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