Polysilicon crystallizing method, method of fabricating thin...

Details Polysilicon crystallizing method, method of fabricating thin... Polysilicon crystallizing method, method of fabricating thin...

2007-02-06

2007-02-06

Malsawma, Lex H. (Department: 2823)

Semiconductor device manufacturing: process

Formation of semiconductive active region on any substrate

Amorphous semiconductor

C438S488000

Reexamination Certificate

active

10189770

ABSTRACT:
A method of crystallizing polysilicon, a method of fabricating a thin film transistor using the same, and a method of fabricating a liquid crystal display thereof form a polysilicon layer having uniformly oriented crystalline grains with high quality. A polysilicon crystallizing method includes forming a polysilicon layer on a substrate, making grains of the polysilicon layer amorphous except a portion of the grains having specific orientation, and crystallizing the polysilicon layer using the grains having the specific orientation.

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