Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2007-04-24
2007-04-24
Ashton, Rosemary (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S325000, C430S326000, C430S905000
Reexamination Certificate
active
10819686
ABSTRACT:
The invention includes new polymers and methods for providing such polymers and photoresists that comprises the polymers. Methods of the invention include those that comprise providing a reaction mixture and adding over the course of a polymerization reaction one or more polymerization reagents to the reaction mixture to provide the polymer. Photoresists containing a polymer of the invention can exhibit significantly improved lithographic properties.
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W. Billmeyer, Jr., ed., Textbook of Polymer Science, 2nd. Ed., Chapters 11 and 12, pp. 328-376 (Wiley-Interscience, A Division of John Wiley and Sons, Inc.), 1971.
Barclay George G.
Caporale Stefan J.
Kavanagh Robert J.
Pugliano Nick
Corless Peter F.
Edwards Angell Palmer & & Dodge LLP
Frickey Darryl P.
Shipley Company L.L.C.
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