Polymers, methods of use thereof, and methods of...

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Reexamination Certificate

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C430S313000, C430S314000, C430S316000, C430S319000, C430S320000, C430S321000, C430S323000, C430S324000, C430S325000, C430S326000, C430S329000, C430S330000

Reexamination Certificate

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07745100

ABSTRACT:
Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.

REFERENCES:
patent: 5167882 (1992-12-01), Jacobine et al.
patent: 5525190 (1996-06-01), Wojnarowski et al.
patent: 6107000 (2000-08-01), Lee et al.
patent: 6121340 (2000-09-01), Shick et al.
patent: 6136212 (2000-10-01), Mastrangelo et al.
patent: 6399672 (2002-06-01), Ceska et al.
patent: 6696217 (2004-02-01), Yoon et al.
patent: 2004/0076910 (2004-04-01), Rutter, Jr. et al.
patent: 2004/0126694 (2004-07-01), Devoe et al.
patent: 2004/0137728 (2004-07-01), Gallagher et al.
patent: 2004/0146803 (2004-07-01), Kohl et al.
patent: 10063157 (2002-07-01), None
patent: 2001-226419 (2001-08-01), None
patent: WO 03/067332 (2003-08-01), None
patent: WO 03/101580 (2003-12-01), None
Machine assisted English translation of JP 2001-226419.
Gimkiewicz et al (“Fabrication of Microprisms for Planar Optical Interconnections by Use of Analog Gray-Scale Lithography with High-Energy-Beam-Sensitive Glass”, Applied Optics, vol. 38, No. 14, p. 2986-2990).
Supplementary European Search Report, European Patent Application No. EP 03 80 9104.
International Search Report, International Application No. PCT/US03/34198.
P. Kohl et al, Air-Gaps for Electrical Interconnections, Electrochemical and solid State Lett, vol. 1, p. 49, 1998.
P. Kohl et al., Air-Gaps in 0.3 μm Electrical Interconnections, IEEE Electron Device Lett.vol. 21, p. 557, 2000.
H.A. Reed et al., Fabrication of Microchannels Using Polycarbonates as Sacrificial Materials, J. Micromech Microeng.,vol. 11 (6), p. 733, 2001.
D. Bhusari et al., Fabrication of Air-Channel Structures for Microfluidic, Microelectromechanical, and Microelectronic Applications, J. Micromech. Microeng., vol. 10 (3), p. 400, 2001.
M.B. Anand et al., Use of Gas as Low-K Interlayer Dielectric in LSI's: Demonstration of Feasibility, IEEE Transactions on Electron Devices, vol. 44, p. 1965, 1997.
C.K. Harnett et al., Heat-Depolymerizable Polycarbonates as Electron Beam Patternable Sacrificial layers for Nanofluidics, J. Vac. Sci. Technol B., vol. 19 (6), p. 2842, 2001.
L.S. Loo et al., Hot Filament Chemical Vapor Deposition of Polyoxymethylene as a Sacrificial Layer for Fabricating Air Gaps, Electrochemical and Solid State Lett., vol. 4, p. G81, 2001.
H-J. Suh et al., Dendritic Material as a Dry-Release Sacrificial Layer, J. Microelectromech. Syst, vol. 9 (2), pp. 198-205, 2000.
J.P. Gravesen et al., Microfluidics—A Review, J. Micromech. Microeng., vol. 3, p. 168, 1993.
R.F. Service, Microchip Arrays Put DNA on the Spot, Science, vol. 282, p. 396, 1998.
J. V. Crivello et al., A new Class of Photoinitiatoers for Cationic Polymerization, Macromolecules, vol. 10 (6), p. 1307, 1977.
R. Taylor, The Nature of the Transition State in Ester Pyrolysis. Part 11. The Relative Rates of Pyrolysis of Ethyl, Isopropyl, and t-Butyl Acetates, Phenylacetates, Benzoates, Phenyl Carbonates, and N-Phenylcarbamates, J. Chem. Soc., Chem. Commun., p. 1025, 1975.
S. Inoue et al., Synthesis and Thermal Degradation of Carbon Dioxide-Epoxide Copolymer, .Appl. Polym. Symp. vol. 26, p. 2573, 1975.
J.M.J. Frechet et al., Design and Synthesis of Novel Allyic and Benzylic Copolycarbonates Suseptible to Aciodolytic or Thermolytic Depolymerization, Makromol, Chem. Rapid Commun., vol. 7, p. 121, 1986.
S.C. Narang et al., Chemical Amplification in t-Diol Polycarbonate Resists, Polym. Prepr., (Am. Chem. Soc. Div. Polym., Chem), vol. 26 (2), p. 323, 1985.
D.J. Drensbourg et al., Bis 2,6-difluorophenoxide Dimeric Complexes of Zinc and Cadmium and Their Phosphine Adducts: Lessons Learned Relative to Carbon Dioxide/Cyclohexene Oxide Alternating Copolymerization Processes Catalyzed by Zinc Phenoxides, J. Amer. Chem. Soc., vol. 122, p. 12487, 2000.
M. Murayama et al., Anionic Ring-Opening Polymerization of a Cyclic Carbonate Having a Norbornene Structure with Amine Initiators, Macromolecules, vol. 31, p. 919, 1998.
Y. Toba et al., Cationic Photopolymerization of Epoxides by Direct and Sensitized Photolysis of Onium Tetrakis (pentafluorophenyl)borate Initiators, Macromolecules, vol. 32 (10), p. 3209, 1999.
J.V. Crivello et al., Diaryliodonium Salts as Thermal Initiators of Cationic Polymerization, J. Polym. Sci. Part A: Polym. Chem., vol. 21, p. 97, 1998.
D. Bhusari et al., Fabrication of Air-Channel Structures for Microfluidic, Microelectromechanical, and Microelectronic Applications, J. Microelectromechanical Sys., vol. 10, No. 3, p. 400-408, Sep. 2001.
X. Wu et al., Lithographic Characteristics and Thermal Processing of Photosensitive Sacrificial Materials, Journal of the Electrochemical Society, vol. 149, pp. G555-G561, 2002.
X. Wu et al., Photoinitiation Systems and Thermal Decomposition of Photodefinable Sacrificial Materials, Journal of Applied Polymer Science, vol. 88, pp. 1186-1195, 2003.

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