Polymers containing protected styrene and unprotected hydroxbenz

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4302831, G03C 1492

Patent

active

058637010

ABSTRACT:
Novel polymers may be used in resist formulations for the fabrication of printing plates and circuit boards and, in particular, for the fabrication of integrated circuits. No autocatalytic decomposition of the compounds occurs and the resist film obtained therewith has good adhesive properties.

REFERENCES:
patent: 5328973 (1994-07-01), Roeschert et al.

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