Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1998-05-05
1999-01-26
Chapman, Mark
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
4302831, G03C 1492
Patent
active
058637010
ABSTRACT:
Novel polymers may be used in resist formulations for the fabrication of printing plates and circuit boards and, in particular, for the fabrication of integrated circuits. No autocatalytic decomposition of the compounds occurs and the resist film obtained therewith has good adhesive properties.
REFERENCES:
patent: 5328973 (1994-07-01), Roeschert et al.
Chapman Mark
Olin Microelectronic Chemicals, Inc.
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