Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-02-01
2005-02-01
Thornton, Yvette C. (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S271100, C430S272100, C430S326000, C430S905000, C430S910000, C526S256000, C526S266000, C526S269000, C526S270000, C526S271000
Reexamination Certificate
active
06849376
ABSTRACT:
The invention includes polymers that contain a polymers of the invention contain one or more 1) carbonate units and/or 2) a lactone provided by a monomer having a ring oxygen adjacent to the monomer vinyl group. The invention also provides photoresists that contain such polymers, particularly for imaging at short wavelengths such as sub-200 nm.
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Barclay George G.
Caporale Stefan J.
Corless Peter F.
Edwards & Angell LLP
Frickey Darryl P.
Shipley Company L.L.C.
Thornton Yvette C.
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