Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1997-08-28
2000-06-20
Hamilton, Cynthia
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430170, G03F 7039
Patent
active
060776439
ABSTRACT:
The present invention provides novel polymers and chemically-amplified positive-acting photoresist compositions that contain such polymers as a resin binder component. The polymers of the invention include acid labile groups that contain isobornyl moieties and groups that contribute to aqueous development of a photoresist such as phenolic groups.
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Bogan, Jr. Leonard E.
Kumar Uday
Sinta Roger F.
Szmanda Charles R.
Cairns S. Matthew
Corless Peter F.
Frickey Darryl P.
Hamilton Cynthia
Shipley Company L.L.C.
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