Polymerizable ester having sulfonamide structure, polymer,...

Details Polymerizable ester having sulfonamide structure, polymer,... Polymerizable ester having sulfonamide structure, polymer,...

2007-10-23

2007-10-23

Kelly, Cynthia H. (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C526S286000, C526S319000, C526S310000, C526S242000

Reexamination Certificate

active

10864424

ABSTRACT:
Novel ester compounds having a sulfonamide structure are polymerizable into polymers having improved transparency at wavelength of up to 300 nm, especially ArF excimer laser light, and dry etching resistance. Resist compositions comprising the polymers are sensitive to high-energy radiation, have a high resolution, and lend themselves to micropatterning with electron beams or deep-UV rays.

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