Polymeric halocarbons as plasma etch barriers

Details Polymeric halocarbons as plasma etch barriers Polymeric halocarbons as plasma etch barriers

1983-10-12

1984-06-05

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156655, 1566591, 156668, 204192E, 427 40, 427 431, 430296, B44C 122, C03C 1500, C03C 2506, B29C 1708

Patent

active

044526652

ABSTRACT:
A polymeric halocarbon is used as an etch barrier for plasma etching in a process to make high resolution, high aspect ratio polymer patterns.

REFERENCES:
patent: 4362598 (1982-12-01), Griffing
Polymer Engineering and Science, Mid-Nov., 1980, vol. 20, No. 16, Oxygen Plasma Removal of Thin Polymer Films, Taylor et al., pp. 1087-1092.

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