Polymer thin-film transistor with contact etch stops

Semiconductor device manufacturing: process – Having organic semiconductive component

Reexamination Certificate

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C438S156000

Reexamination Certificate

active

06911354

ABSTRACT:
A method and structure of forming a vertical polymer transistor structure is disclosed having a first conductive layer, filler structures co-planar with the first conductive layer, a semiconductor body layer above the first conductive layer, a second conductive layer above the semiconductor body layer, and an etch stop strip positioned between a portion of the first conductive layer and the semiconductor body layer.

REFERENCES:
patent: 6556257 (2003-04-01), Ino
patent: 6812493 (2004-11-01), Nishio

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