Polymer for forming anti-reflective coating layer

Details Polymer for forming anti-reflective coating layer Polymer for forming anti-reflective coating layer

2006-03-02

2008-12-16

Hamilton, Cynthia (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S271100, C430S323000, C528S361000

Reexamination Certificate

active

07465531

ABSTRACT:
A polymer for forming an organic anti-reflective coating layer between an etching layer and a photoresist layer to absorb an exposure light in a photolithography process and a composition comprising the same are disclosed. The polymer for forming an organic anti-reflective coating layer has repeating units represented bywherein, R1is a substituted or non-substituted alky group of C1 to C5.

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