Polyimide thermal isolation mesa for a thermal imaging system

Details Polyimide thermal isolation mesa for a thermal imaging system Polyimide thermal isolation mesa for a thermal imaging system

1991-07-30

1993-11-23

McCamish, Marion E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430311, 430327, 430314, 430329, 437229, G03C 500

Patent

active

052643263

ABSTRACT:
A mesa (31) is formed from polyimide (or a similar polymer material) to achieve a high thermal resistance. In an exemplary thermal imaging application, an array of thermal isolation mesa structures (30) are disposed on an integrated circuit substrate (20) for electrically connecting and bonding a corresponding focal plane array (5) of thermal sensors (10). Each mesa structure (30) includes a polyimide mesa (31) over which is formed a metal conductor (32) that extends from the top of the mesa down a mesa sidewall to an adjacent IC contact pad (22). When the focal plane array (5) is bonded to the corresponding array of thermal isolation mesa structures (30), a thermally isolated, but electrically conductive path is provided between the sensor signal electrode (16) of the thermal sensor (10) and the corresponding contact pad (22) of the integrated circuit substrate (20).

REFERENCES:
patent: 4745045 (1988-05-01), Fredericks
patent: 4883744 (1989-11-01), Feilchenfield et al.
patent: 4902606 (1990-02-01), Patraw

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