Polyimide coating device having a polyimide supply status sensin

Details Polyimide coating device having a polyimide supply status sensin Polyimide coating device having a polyimide supply status sensin

1997-07-25

2000-03-28

Aftergut, Jeff H.

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to attribute, absence or presence of work

118692, 118712, 422110, 422111, 422119, 422133, B05C 1100

Patent

active

060426497

ABSTRACT:
A polyimide coating device includes a bubble sensor for sensing the supply of a polyimide from a main polyimide storage tank. The coating device also includes an auxiliary storage tank filled with a predetermined amount of polyimide at all the times. A discharge pipe is connected to the auxiliary storage tank such that any gas introduced into a supply pipe between the main storage tank and the auxiliary storage tank is easily discharged prior to the polyimide entering a reaction chamber.

REFERENCES:
patent: Re36050 (1999-01-01), Thakur et al.
patent: 4672997 (1987-06-01), Landis et al.
patent: 5288325 (1994-02-01), Gomi
patent: 5776255 (1998-07-01), Asaba et al.

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