Polyfunctional vinyl ether compound and photoresist resin compos

Details Polyfunctional vinyl ether compound and photoresist resin compos Polyfunctional vinyl ether compound and photoresist resin compos

1995-10-20

1997-09-30

Lesmes, George F.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430171, 430176, 4302871, 4302881, 522149, 522166, 522181, G03C 173, G03F 7027, C08F 246

Patent

active

056724632

ABSTRACT:
A polyfunctional vinyl ether compound represented by formula (I): ##STR1## wherein n, which is an average repeating number, represents a number of from 0 to 20; R.sub.1 and R.sub.2 each independently represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group, an aralkyl group, an alkoxy group, an aryloxy group, or a cycloalkyl group; Q each independently represents --OH or a group represented by the formula --OROCH.dbd.CH.sub.2, wherein R represents an alkylene group having from 1 to 12 carbon atoms, the molar ratio of (--OH)/(--OROCH.dbd.CH.sub.2) being from 10/90 to 90/10; and A each independently represents a divalent hydrocarbon group having from 1 to 30 carbon atoms.

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