Polycrystalline silicon thin film transistor

Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond

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428336, 428428, 428432, 428446, 428472, 428702, 428901, 428701, 257347, B32B 1700

Patent

active

052758729

ABSTRACT:
An improved field effect transistor having a source region, a drain region, and channel region in a polycrystalline silicon layer, the improvement being that the polycrystalline silicon layer has approximately equal concentrations of N and P type dopants embodied therein, which serves to restrain movement of P/N junctions.

REFERENCES:
patent: 4178191 (1979-12-01), Flatley
patent: 4489104 (1984-12-01), Lee
patent: 4673531 (1987-06-01), Lee
patent: 4682407 (1987-07-01), Wilson
patent: 4772927 (1988-09-01), Saito
patent: 4866006 (1989-09-01), Imagawa
"Polycrystalline-Silicon Device Technology for Large-Area Electronics," IEEE Transactions on Electron Devices, 33, 4, 477-481.

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