Polycrystalline silicon capable of yielding long lifetime single

Details Polycrystalline silicon capable of yielding long lifetime single Polycrystalline silicon capable of yielding long lifetime single

1988-06-01

1990-05-01

Hearn, Brian E.

Metal treatment

Barrier layer stock material, p-n type

15662073, C30B 1316

Patent

active

049210262

ABSTRACT:
Polycrystalline silicon rod capable of providing within no more than two floating zoning passes, unicrystalline silicon exhibiting a resistivity of at least 10,000 ohm-cm (donor) and a lifetime of at least about 10,000 milliseconds, exhibits a copper X-ray diffraction pattern having a peak at 26.85.degree..+-.0.25.degree. (2 theta) and has less than 15 ppta boron and less than 20 ppta phosphorus.

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patent: 4150168 (1979-04-01), Yatsuruei et al.
patent: 4170667 (1979-10-01), Rodgers
patent: 4312700 (1982-01-01), Helmreich et al.
patent: 4681652 (1987-07-01), Rogers et al.
patent: 4722764 (1988-02-01), Herzer et al.
patent: 4826668 (1989-05-01), Breneman et al.

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