4. Metal treatment
  5. Barrier layer stock material, p-n type

Howard J. Dawson

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Chemical vapor deposition system for polycrystalline silicon...

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Reexamination Certificate

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Chemical vapor deposition system for polycrystalline silicon...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Chemical vapor deposition system for polycrystalline silicon...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Polycrystalline silicon capable of yielding long lifetime single

Metal treatment – Barrier layer stock material – p-n type
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Rod replenishment system for use in single crystal silicon...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Reexamination Certificate

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