Polycrystalline diamond heat sink having major surfaces electric

Details Polycrystalline diamond heat sink having major surfaces electric Polycrystalline diamond heat sink having major surfaces electric

1994-01-14

1996-02-27

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

With provision for cooling the housing or its contents

257 77, 257739, 361708, H01L 2334, H01L 310312

Patent

active

054951267

ABSTRACT:
A polycrystalline diamond is prepared by chemical vapor deposition (step 101). A surface of the polycrystalline diamond is metallized (step 102). The metallized surface of the polycrystalline diamond is grooved with a YAG laser (step 103). A wedge or the like is driven into the grooves of the polycrystalline diamond to pressurize the same, whereby the polycrystalline diamond is divided along the grooves (step 104). Alternatively, a surface of a polycrystalline diamond prepared by chemical vapor deposition is grooved with a YAG laser (step 112), and the surface of the polycrystalline diamond is metallized (step 113) after the grooving. The obtained diamond heat sink (10) includes a first layer (11a) grooved with a laser, and a mechanically divided second layer (11b). Graphite adheres to the outer peripheral surface of the first layer (11a). The outer peripheral surface of the second layer (11b) has a greater surface roughness than that of the first layer (11a).

REFERENCES:
patent: 4595603 (1986-06-01), Davies et al.
patent: 4972250 (1990-11-01), Omori et al.
patent: 4981818 (1991-01-01), Anthony et al.
patent: 5087959 (1992-02-01), Omori et al.
patent: 5146314 (1992-09-01), Pankove
patent: 5294381 (1994-03-01), Iguchi et al.

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