Poly(silyl silane) homo and copolymers

Details Poly(silyl silane) homo and copolymers Poly(silyl silane) homo and copolymers

1989-03-31

1991-08-13

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430297, 430311, 430312, 430323, G03C 500

Patent

active

050395939

ABSTRACT:
Poly(silyl silanes) have been prepared. They have high photosensitivity and excellent resistance to oxygen-reactive ion etching processes. They are useful as photodepolymerizable photoresists, barrier layers, etc.

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