Polishing system comprising a highly branched polymer

Details Polishing system comprising a highly branched polymer Polishing system comprising a highly branched polymer

2007-08-14

2007-08-14

Norton, Nadine G. (Department: 1765)

Compositions

Etching or brightening compositions

C252S079400, C438S692000

Reexamination Certificate

active

10755154

ABSTRACT:
The invention provides a polishing system and method of its use comprising (a) a liquid carrier, (b) a polymer having a degree of branching of about 50% or greater, and (c) a polishing pad, an abrasive, or a combination thereof.

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