Abrading – Abrading process – Utilizing fluent abradant
Patent
1997-07-15
1999-03-02
Scherbel, David A.
Abrading
Abrading process
Utilizing fluent abradant
438692, 216 88, 252 791, B24B 100
Patent
active
058762663
ABSTRACT:
A desired reagent is delivered to a workpiece undergoing a chemical mechanical polishing process with a chemical mechanical planarization apparatus. A slurry and polishing pad are provided for the polishing process. Reagent containing microcapsules are also provided, the microcapsules encapsulating a desired reagent. The workpiece is polished with a combination of the slurry, the polishing pad, and the microcapsules, wherein the encapsulated reagents are controllably released during the polishing step via manipulation of a polishing parameter. In one embodiment, the microcapsules are included in the slurry. In an alternate embodiment, the microcapsules are embedded within the polishing pad.
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Miller Matthew Kilpatrick
Morgan Clifford Owen
Rutten Matthew Jeremy
Walton Erick G.
Wright Terrance Monte
International Business Machines - Corporation
Scherbel David A.
Walter, Jr. Howard J.
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