4. Cutting by use of rotating axially moving tool
  5. Tool-support with means to move tool relative to tool-support
  6. To move radially

Takeshi Soma

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Polishing pad surface shape measuring instrument, method of...

Optics: measuring and testing – Shape or surface configuration
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Tool assembly

Cutting by use of rotating axially moving tool – Tool-support with means to move tool relative to tool-support – To move radially
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2500607

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