Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2005-10-25
2005-10-25
Morgan, Eileen P. (Department: 3723)
Abrading
Abrading process
With tool treating or forming
C451S443000, C451S036000, C451S446000
Reexamination Certificate
active
06958005
ABSTRACT:
A pad conditioning system for conditioning a polishing pad in conjunction with a workpiece polishing operation includes a pad conditioning head coupled with a positioning unit. The pad conditioning head includes a plurality of abrasive particles protruding from a surface of the pad conditioning head. The positioning unit is configured to move the surface into contact with a polishing pad. The pad conditioning system also includes a liquid supply nozzle. The liquid supply nozzle is configured to selectively discharge liquid proximate to the abrasive particles that are in contact with the polishing pad to minimize frictional wear of the abrasive particles.
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Brinks Hofer Gilson & Lione
Lam Research Corporation
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