Polishing pad conditioner and chemical-mechanical polishing...

Details Polishing pad conditioner and chemical-mechanical polishing... Polishing pad conditioner and chemical-mechanical polishing...

2005-05-17

2005-05-17

Hail, III, Joseph J. (Department: 3723)

Abrading

Accessory

Dressing

C451S041000, C451S056000, C451S060000, C451S285000, C451S286000, C451S287000, C451S288000, C451S443000, C451S444000, C451S446000

Reexamination Certificate

active

06893336

ABSTRACT:
A polishing pad conditioner for a chemical-mechanical polishing apparatus includes a conditioning plate having a first recess and a holder having a second recess. The first recess is formed on the upper face of the conditioning plate, and the second recess is formed on the bottom face of the holder. A first filling member having a specific gravity smaller than that of the conditioning plate fills up the first recess, and a second filling member having a specific gravity smaller than that of the holder fills up the second recess. Therefore, the weight of the polishing pad conditioner can be reduced, and the durability and service life of an air bladder that adjusts the height of the polishing pad conditioner can be improved.

REFERENCES:
patent: 5626509 (1997-05-01), Hayashi
patent: 5951373 (1999-09-01), Shendon et al.
patent: 6293853 (2001-09-01), Perlov et al.
patent: 6325709 (2001-12-01), Nanda et al.

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