Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With control responsive to sensed condition
Reexamination Certificate
2007-01-02
2007-01-02
Wilkins, III, Harry D (Department: 1742)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
With control responsive to sensed condition
C205S663000, C204S228700, C204S229800
Reexamination Certificate
active
10304174
ABSTRACT:
A polishing method for electropolishing a metal film formed on a wafer surface so as to fill concave portions formed on the wafer surface comprises a step of determining an electropolishing end point of the metal film on the basis of a change of a current waveform resulting from electropolishing the metal film. An electropolishing apparatus comprising a current detector for detecting a current waveform resulting from electropolishing a metal film and an end point determination part for determining an electropolishing end point of the metal film on the basis of the change of a current detected with the current detector is used to realize the polishing method.
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Ishihara Masao
Nogami Takeshi
Sato Shuzo
Yasuda Zenya
Depke Robert J.
Rockey, Depke, Lyons & Kitzinger LLC
Sony Corporation
Wilkins, III Harry D
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