Polishing method

Details Polishing method Polishing method

2006-08-15

2006-08-15

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S056000

Reexamination Certificate

active

07090563

ABSTRACT:
A polishing method includes the steps of: (a) polishing a to-be-polished object by moving an abrasive cloth relative to the to-be-polished object while pressing the to-be-polished object against the abrasive cloth; and (b) pressing a dressing member against the abrasive cloth moving relative to the to-be-polished object with the to-be-polished object pressed against the abrasive cloth and relatively moving the abrasive cloth and the dressing member, thereby dressing the abrasive cloth while polishing the to-be-polished object. The difference between the torque current of a motor in the step (a) and the torque current of the motor in the step (b) is determined, and when the determined difference falls below a previously set value is detected.

REFERENCES:
patent: 6910943 (2005-06-01), Ishikawa et al.
patent: 2001/0010999 (2001-08-01), Numoto
patent: 2004/0072499 (2004-04-01), Wakabayashi
patent: 2002-103202 (2002-04-01), None

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