Polishing media stabilizer

Details Polishing media stabilizer Polishing media stabilizer

2008-06-03

2008-06-03

Van Nguyen, Dung (Department: 3723)

Abrading

Machine

Endless band tool

C451S388000, C451S494000, C451S287000

Reexamination Certificate

active

07381116

ABSTRACT:
A polishing apparatus that employs a polishing media retention arrangement to prevent slippage or wrinkles in the polishing media during polishing. The polishing media is drawn against a support surface by a vacuum applied between the polishing media and the support surface. Also, a porous layer may be placed between the polishing media and the support surface to form dimples in the polishing media upon the application of vacuum. An alternative arrangement draws the polishing media against a carrier and the substrate to be polished.

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