Polishing head testing with movable pedestal

Details Polishing head testing with movable pedestal Polishing head testing with movable pedestal

2011-08-30

2011-08-30

Phan, Huy (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750300, C324S754150, C324S756010, C073S825000, C451S005000, C451S388000

Reexamination Certificate

active

08008941

ABSTRACT:
A polishing head is tested in a test station having a pedestal for supporting a test wafer and a controllable pedestal actuator to move a pedestal central wafer support surface and a test wafer toward the polishing head. In another aspect of the present description, the test wafer may be positioned using a positioner having a first plurality of test wafer engagement members positioned around the pedestal central wafer support surface. In another aspect, the wafer position may have a second plurality of test wafer engagement members positioned around an outer wafer support surface disposed around the pedestal central wafer support surface and adapted to support a test wafer. The second plurality of test wafer engagement members may be distributed about a second circumference of the ring member, the second circumference having a wider diameter than the first circumference. Additional embodiments and aspects are described and claimed.

REFERENCES:
patent: 5035087 (1991-07-01), Nishiguchi et al.
patent: 5313156 (1994-05-01), Klug et al.
patent: 5342068 (1994-08-01), Large
patent: 5486129 (1996-01-01), Sandhu et al.
patent: 5539676 (1996-07-01), Yamaguchi
patent: 5642056 (1997-06-01), Nakajima et al.
patent: 5660581 (1997-08-01), Shin et al.
patent: 5664987 (1997-09-01), Rentein
patent: 5676590 (1997-10-01), Hiraoka
patent: 5741171 (1998-04-01), Sarfaty et al.
patent: 5759918 (1998-06-01), Hoshizaki et al.
patent: 5804983 (1998-09-01), Nakajima et al.
patent: 5828223 (1998-10-01), Rabkin et al.
patent: 5828225 (1998-10-01), Obikane et al.
patent: 5989342 (1999-11-01), Ikeda et al.
patent: 6053688 (2000-04-01), Cheng
patent: 6066266 (2000-05-01), Osugi et al.
patent: 6113480 (2000-09-01), Hu et al.
patent: 6135698 (2000-10-01), Bonora et al.
patent: 6164633 (2000-12-01), Mulligan et al.
patent: 6166552 (2000-12-01), O'Connell
patent: 6220936 (2001-04-01), Quek
patent: 6251215 (2001-06-01), Zuniga et al.
patent: 6257564 (2001-07-01), Avneri et al.
patent: 6259247 (2001-07-01), Bannai
patent: 6272902 (2001-08-01), Chen et al.
patent: 6361422 (2002-03-01), Ettiger et al.
patent: 6379221 (2002-04-01), Kennedy et al.
patent: 6402595 (2002-06-01), Fiesser
patent: 6402598 (2002-06-01), Ahn et al.
patent: 6428389 (2002-08-01), Sato et al.
patent: 6459945 (2002-10-01), Singh et al.
patent: 6501289 (2002-12-01), Takekoshi
patent: 6522125 (2003-02-01), Sagawa
patent: 6549279 (2003-04-01), Adams et al.
patent: 6583614 (2003-06-01), Takekoshi
patent: 6592429 (2003-07-01), Campbell
patent: 6626744 (2003-09-01), White et al.
patent: 6695682 (2004-02-01), Sato et al.
patent: 6707310 (2004-03-01), Takekoshi
patent: 6762616 (2004-07-01), Kawaguchi et al.
patent: 6767170 (2004-07-01), Kostler et al.
patent: 6794889 (2004-09-01), Jafari et al.
patent: 6876215 (2005-04-01), Hannan et al.
patent: 6894480 (2005-05-01), Back
patent: 6933736 (2005-08-01), Kobayashi et al.
patent: 6997664 (2006-02-01), Liang et al.
patent: 7019512 (2006-03-01), Martin et al.
patent: 7034563 (2006-04-01), Souchkov et al.
patent: 7044832 (2006-05-01), Yilmaz et al.
patent: 7089782 (2006-08-01), Lin et al.
patent: 7750657 (2010-07-01), Schmidt et al.
patent: 2001/0012751 (2001-08-01), Boyd et al.
patent: 2002/0016131 (2002-02-01), Sandhu et al.
patent: 2002/0024174 (2002-02-01), Gaal et al.
patent: 2002/0137436 (2002-09-01), Kistler et al.
patent: 2003/0134571 (2003-07-01), Cheng et al.
patent: 2004/0051517 (2004-03-01), Holt et al.
patent: 2004/0134287 (2004-07-01), Lin et al.
patent: 2005/0176349 (2005-08-01), Yilmaz et al.
patent: 2005/0227595 (2005-10-01), Marquardt et al.
patent: 2005/0277323 (2005-12-01), Eldridge et al.
patent: 3713155 (1998-11-01), None
patent: 10123386 (2002-11-01), None
patent: 0747167 (1996-12-01), None
patent: 0879678 (1998-11-01), None
patent: 1018400 (2000-07-01), None
patent: 8094508 (1996-04-01), None
patent: 11067855 (1999-03-01), None
patent: 2001-298008 (2001-10-01), None
patent: 2001-310253 (2001-11-01), None
Applied Materials, “CMP Titan Head Test Fixture Manual,” Rev. 004, Part No. 0251-01076, Section 2.3, Feb. 2001, pp. 14-17.
EP Communication and Search Report dated Jul. 21, 2008 for Application No. 08152801.0-2302.
Office Action 1, Apr. 21, 2009, for Application No. EP08152801.0, 1 pg.
Office Action 2, Oct. 6, 2009, for Application No. EP08152801.0, 3 pp.
Office Action 1, Dec. 31, 2009, for Application No. KR10-2008-0023921, 3 pp.
Office Action 1, Dec. 31, 2009, for Application No. KR10-2008-0023921, 2 pp. [Translation].
PCT/US04/00328 Partial Search and Invitation to Pay Additional Fees, mailed Jun. 24, 2004.
PCT/US04/00328 International Search Report, mailed Sep. 6, 2004.

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