Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate
2009-06-19
2010-11-30
Rose, Robert (Department: 3727)
Abrading
Precision device or process - or with condition responsive...
By optical sensor
C451S288000, C451S533000
Reexamination Certificate
active
07841925
ABSTRACT:
A polishing article includes a polishing layer having a polishing surface and a solid light-transmissive window in the polishing layer, the window having a first non-linear edge that extends along a first axis parallel to the polishing surface, the first non-linear edge including a plurality of projections and a plurality of recesses extending parallel to the polishing surface and disposed in an alternating pattern along the first axis.
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Iyer Anand N.
Leung Garlen C.
McReynolds Peter
Menk Gregory E.
Prabhu Gopalakrishna B.
Applied Materials Inc.
Fish & Richardson
Rose Robert
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