Polishing apparatus and polishing method

Details Polishing apparatus and polishing method Polishing apparatus and polishing method

1996-04-25

1999-05-18

Morgan, Eileen P.

Abrading

Precision device or process - or with condition responsive...

With indicating

451 41, 451285, 451287, B24B49/00

Patent

active

059046090

ABSTRACT:
A polishing apparatus comprises a first surface plate for supporting a polishing object, a driving mechanism for rotating the first surface plate, a second surface plate arranged so as to oppose to the first surface plate, an abrasive cloth stuck to the second surface plate, a vibration detector attached to the first surface plate or the second surface plate for detecting vibration in polishing, a controlling portion for controlling polishing operation of the first surface plate and the second surface plate, and signal analyzing unit for analyzing vibration intensity detected by the a vibration detector through frequency analysis, integrating the vibration intensity relative to time, and transmitting a polishing stop signal to stop polishing operation of the first surface plate and the second surface plate to the controlling portion when variation in a resultant integral value relative to time is less than a first reference value or when the resultant integral value is less than a second reference value.

REFERENCES:
patent: 5222329 (1993-06-01), Yu
patent: 5245794 (1993-09-01), Salugsugan

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