Polishing apparatus

Details Polishing apparatus Polishing apparatus

2006-02-14

2006-02-14

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S285000

Reexamination Certificate

active

06997778

ABSTRACT:
A polishing apparatus comprises a polishing tool, a substrate holding member, and a sensor for detecting a failure of a substrate to be polished.

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