Polished self-aligned pixel for a liquid crystal silicon light v

Details Polished self-aligned pixel for a liquid crystal silicon light v Polished self-aligned pixel for a liquid crystal silicon light v

1998-12-03

1999-12-28

Sikes, William L.

Liquid crystal cells, elements and systems

Particular structure

Having significant detail of cell structure only

349156, 430311, 430319, G02F 11343, G02F 11339, G03C 500

Patent

active

060088761

ABSTRACT:
An array of pixels in a liquid crystal silicon light valve are fabricated with a minimum of surface topology by forming raised dielectric spacer walls on an underlying array support surface prior to the deposition of the metal pixel electrode layer. Deposition of the metal pixel electrode layer, followed by chemical-mechanical polishing to stop on the top of the spacer walls, produces an electrode surface that is flush with the tops of the dielectric spacer walls. This resulting planarity in the surface of the pixel cell array minimizes surface topology exhibited by the array, maximizing reflectance of the light valve.

REFERENCES:
patent: 5076670 (1991-12-01), Sayyah
patent: 5244534 (1993-09-01), Yu et al.
patent: 5497255 (1996-03-01), Yamazaki et al.
patent: 5706067 (1998-01-01), Colgan et al.
patent: 5708486 (1998-01-01), Miyawaki et al.
patent: 5764324 (1998-06-01), Lu et al.

Affiliated with

Also associated with

Rating

Polished self-aligned pixel for a liquid crystal silicon light v does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Polished self-aligned pixel for a liquid crystal silicon light v, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polished self-aligned pixel for a liquid crystal silicon light v will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2386117