Polarizing beam splitter device, interferometer module,...

Details Polarizing beam splitter device, interferometer module,... Polarizing beam splitter device, interferometer module,...

2008-01-08

2008-01-08

Lee, Hwa (Andrew) (Department: 2886)

Optics: measuring and testing

By light interference

Having polarization

C359S490020

Reexamination Certificate

active

07317539

ABSTRACT:
The invention relates to a polarizing beam splitter device, an interferometer module system, a lithographic apparatus, and a device manufacturing method. The polarizing beam splitter device includes an optical element and a polarizing beam splitter layer. The optical element includes a retroreflector surface having three mutually perpendicular faces of high optical quality, a radiation beam passage surface and a handling surface. By designing the optical element, in particular the handling portion, to the shape of a beam splitter element, such as a prism, the handling portion, and thus the polarizing optical beam splitter device etc. itself, may be made more compact and with fewer surfaces to be polished and/or antireflection-coated. The positioning of the parts in a beam splitter is more reliable. Devices, systems in which the polarizing beam splitter device has been incorporated, such as a polarizing beam splitter device with quarter wave plates and a reference mirror fixed thereto, may also be made more compact, accurate and reliable.

REFERENCES:
patent: 4509858 (1985-04-01), Smythe et al.
patent: 5056921 (1991-10-01), Chaney
patent: 6163379 (2000-12-01), de Groot
patent: 6208424 (2001-03-01), de Groot
patent: 6876451 (2005-04-01), Carlson
patent: 2005/0094155 (2005-05-01), Hill et al.
patent: 2005/0195404 (2005-09-01), Carlson
patent: 2006/0087658 (2006-04-01), Sesko et al.
patent: 2006/0132794 (2006-06-01), Badami et al.

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