Polarizer-sample-analyzer intensity quotient ellipsometry

Details Polarizer-sample-analyzer intensity quotient ellipsometry Polarizer-sample-analyzer intensity quotient ellipsometry

1996-02-20

1998-01-06

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

Of surface reflection

G01N 2121

Patent

active

057060886

ABSTRACT:
A polarizer-sample-analyzer intensity quotient ellipsometer and ellipsometric technique is disclosed which includes: a polarized light source, including a light source and a polarizer, for providing polarized light; and a detecting device, including an analyzer and a photodetector. The ellipsometer successively measures three intensities of polarized light emitted by the polarized light source and reflected by the sample being measured with the azimuth angle of the polarizer rotated to .+-.45.degree. with respect to a plane of incidence and the azimuth angle of the analyzer successively rotated to 0.degree.,60.degree., and 120.degree.. With these three measurements, the ellipsometric parameters .psi. and .DELTA. can be deduced. The invention also calculates deviations in the azimuth angles of the polarizer and analyzer with respect to a plane of incidence by utilizing two intensity quotients under two incident angles to be equal after roughly adjusting azimuth angles of the polarizer and the analyzer.

REFERENCES:
patent: 4030836 (1977-06-01), Smith
patent: 4516855 (1985-05-01), Korth
McCrackin et al., J. Res. Natl. Bur. Stand., vol. 67A, No. 4, pp. 363-377, Jul.-Aug. 1963.
Kawabata, J. Opt. Soc. Am. A/vol. 1, No. 7, pp. 706-710, Jul. 1984.
Meyer et al., J. Applied Physics, vol. 38, No. 9, pp. 3682-3684 (Aug. 1967).
Collins, Rev. Sci. Instrum. 61(8), pp. 2029-2062 (Aug. 1990).

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