Polarizer and microlithography projection system with a...

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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C359S490020, C359S506000

Reexamination Certificate

active

06856379

ABSTRACT:
A polarizer suitable for transforming incident linearly polarized or circularly polarized light into exiting radially or tangentially polarized light with virtually no transmission losses has, in one of its embodiments, a plate fabricated from birefringent material on whose entrance and exit faces small zones (11, 12) with deflecting structures (8, 9) in the form of gratings or Fresnel surfaces have been created. The crystal axis (5) of said birefringent material is aligned parallel to the incident light beam. Said deflecting structures deflect light along a transmission direction (13) that is inclined with respect to said crystal axis (5), causing a phase shift between the field components of the transmitted light. Suitable choices of the angle of inclination (NW) of said transmission direction with respect to said crystal axis and the thickness (D) of said plate will allow transforming incident linearly polarized or circularly polarized light into an exiting light beam with an axisymmetric (tangential or radial) polarization distribution.

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