Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-07-03
2007-07-03
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S364000, C356S365000, C356S366000, C356S367000, C356S368000
Reexamination Certificate
active
11098764
ABSTRACT:
A polarization modulation photoreflectance technique has been developed for optical characterization of semiconductor electronic interfaces. By using a laser source in conjunction with polarization state modulation, a polarization modulation spectroscopy technique may be used to characterize the optical response of semiconductor materials and structures. Disclosed methods and instruments are suitable for characterization of optical signatures of electronic interfaces, including characterization of electric fields at semiconductor interfaces.
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Toatley , Jr. Gregory J.
Ton Tri
Vinson & Elkins LLP
Xitronix Corporation
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