Polarization analyzing method

Details Polarization analyzing method Polarization analyzing method

2005-09-27

2005-09-27

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S630000

Reexamination Certificate

active

06950186

ABSTRACT:
Assuming that the s-polarized light of the incident light is reflected from the interface of the layer B, and the p-polarized light is reflected from the interface of the layer D, each amplitude reflectivity of Rs and Rp are calculated, and tan ψ of a function of the amplitude ratio ψ of the p-polarization component to the s-polarization component and cos Δ of a function of the phase difference Δ between the p-polarization component and the s-polarization component are calculated, thereby creating reference data. The thickness tA of the oxide film301is determined on the basis of the reference data. Thus, the thickness and cross section shape of the film formed on the multilayer interconnection are measured in a nondestructive manner with high throughput.

REFERENCES:
patent: 6233046 (2001-05-01), Alba et al.
patent: 6590656 (2003-07-01), Xu et al.
patent: 11-316187 (1999-11-01), None

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