Radiant energy – Inspection of solids or liquids by charged particles
Patent
1987-09-09
1989-05-09
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 250423P, G01N 2300
Patent
active
048291773
ABSTRACT:
A point projection photoelectron microscope is disclosed. A specimen is enclosed in a photoconductor that is subject to the photoelectric effect. The specimen is positioned on a pedestal in an evacuated chamber. The specimen is bombarded by radiation, either of light, ultraviolet radiation, or soft x-rays. The is in a vacuum chamber and it is highly charged with a negative potential. The vacuum chamber includes a surface sensitive to electron flow for making an image. This surface is a phosphor screen or an image intensifier having the capability to be gated for imaging or not imaging incident electrons or a segmented electron collecting anode for electronic imaging. In operation, a collimated beam of radiation, ranging from light to soft x-rays is projected through a specimen disposed in the photoemitter. An image of the specimen is produced on the photoemitter. The light or x-ray which impact on the photoemitter which produce electrons by the photoelectric effect. The electrons migrate beyond the photoemitter where the electric field at the tip of the photoconductor radially repels the electrons to and towards the imaging surface, typically the image intensifier.
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