Pneumatic control of the motion of objects suspended on an air f

Details Pneumatic control of the motion of objects suspended on an air f Pneumatic control of the motion of objects suspended on an air f

1977-02-28

1979-08-21

Nase, Jeffrey V.

Conveyors: fluid current

With means to control conveying fluid or movement of load in...

188 1R, 188356, 226 97, 271183, 271195, 406 84, 406 87, B65G 5102

Patent

active

041651324

ABSTRACT:
This specification deals with the stopping, positioning, orienting and redirecting a semiconductor wafer being transported along a track on an air film or bed of air. The stopping mechanism is an air jet located in a groove in the track, wafers passing over this air jet on an air film are sensed by a pneumatic sensor that turns on the air jet to set up an air stream under the transporting surface of the air film. This air stream sucks the fluid in the air film along with it in the groove causing a vacuum in the bed in the area of the nozzle of the air jet. The wafers are then stopped by the suction of the vacuum. Positioning, orienting and redirecting is done using the air jet and pneumatic sensor in combination with special air jet arrangements and operations.

REFERENCES:
patent: 3158367 (1964-11-01), Tarbuck
patent: 3285608 (1966-11-01), Lyman
patent: 3796466 (1974-03-01), Lasch
patent: 3933351 (1976-01-01), Mayer et al.
patent: 3976329 (1976-08-01), Adams et al.
patent: 4081201 (1978-03-01), Hassan et al.
IBM Technical Disclosure Bulletin; vol. 16, No. 2; Jul. 1973; "Air Track Buffer" by Babinski; pp. 469-470.
IBM Technical Disclosure Bulletin; vol. 18, No. 2; Jul. 1975; "Back Pressure Sense Circuit" by Appenzeller; pp. 422-424.

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